The Science and engineering of microelectronic fabrication
Saved in:
| Hovedforfatter: | |
|---|---|
| Sprog: | engelsk |
| Udgivet: |
New York
OUP
2001
|
| Udgivelse: | 2nd ed. |
| Fag: | |
| Tags: |
Ingen Tags, Vær først til at tagge denne postø!
|
MARC
| LEADER | 00000am aa2200000a 44500 | ||
|---|---|---|---|
| 001 | OHA-20260330-717 | ||
| 003 | OSt | ||
| 005 | 20260619090819.0 | ||
| 008 | 260619b |||||||| |||| 00| 0 eng d | ||
| 020 | |a 0-19-513605-5 | ||
| 100 | |a Campbell, Stephen A | ||
| 245 | |a The Science and engineering of microelectronic fabrication | ||
| 250 | |a 2nd ed. | ||
| 260 | |a New York |b OUP |c 2001 | ||
| 942 | |c BK | ||
| 952 | |0 0 |1 0 |4 0 |6 621_381500000000000_C187E2 |7 0 |9 75137 |a MSIT |b MSIT |c GEN |d 2026-03-30 |g 325.00 |l 0 |o 621.3815 C187e2 |p 14556 |r 2026-03-30 21:18:56 |t 1 |v 325.00 |w 2026-03-30 |y BK | ||
| 952 | |0 0 |1 0 |4 0 |6 621_381500000000000_C187E2 |7 0 |9 75138 |a MSIT |b MSIT |c GEN |d 2026-03-30 |g 325.00 |l 0 |o 621.3815 C187e2 |p 14557 |r 2026-03-30 21:18:56 |t 2 |v 325.00 |w 2026-03-30 |y BK | ||
| 952 | |0 0 |1 0 |4 0 |6 621_381500000000000_C187E2 |7 0 |9 75139 |a MSIT |b MSIT |c GEN |d 2026-03-30 |g 325.00 |l 0 |o 621.3815 C187e2 |p 14558 |r 2026-03-30 21:18:56 |t 3 |v 325.00 |w 2026-03-30 |y BK | ||
| 952 | |0 0 |1 0 |4 0 |6 621_381500000000000_C187E2 |7 0 |9 75140 |a MSIT |b MSIT |c GEN |d 2026-03-30 |g 325.00 |l 0 |o 621.3815 C187e2 |p 14559 |r 2026-03-30 21:18:56 |t 4 |v 325.00 |w 2026-03-30 |y BK | ||
| 952 | |0 0 |1 0 |4 0 |6 621_381500000000000_C187E2 |7 0 |9 75141 |a MSIT |b MSIT |c GEN |d 2026-03-30 |g 325.00 |l 0 |o 621.3815 C187e2 |p 14560 |r 2026-03-30 21:18:56 |t 5 |v 325.00 |w 2026-03-30 |y BK | ||
| 999 | |c 3942 |d 3942 | ||
| 650 | 0 | |a ECE | |
| 650 | 0 | |a Microelectronics | |
| 650 | 0 | |a Microelectronic fabrication. | |