APA (7th ed.) Citation
Campbell, S. A. (2001). The Science and engineering of microelectronic fabrication (2nd ed.). OUP.
Chicago Style (17th ed.) Citation
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York: OUP, 2001.
MLA (9th ed.) Citation
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. OUP, 2001.
Warning: These citations may not always be 100% accurate.