Campbell, S. A. (2001). The Science and engineering of microelectronic fabrication (2nd ed.). OUP.
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芝加哥风格引文
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York: OUP, 2001.
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MLA引文
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. OUP, 2001.
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警告:这些引文格式不一定是100%准确.